|
GEN10 Automated R&D MBE System -Bruker |
|
.jpg) Wafers up to 1x3"
The most economical, flexible cluster tool system, in a proven platform, allows for up to three configurable, material specific growth modules. This enables high system utilization allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations.
GEN10 Automated R&D MBE System
* Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
* Economical upgrade path to additional growth modules, maximum of three
* Configurable, material specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
* Direct process path to larger production MBE systems
More Information, please contact us |
|
GEN II R&D MBE System - Bruker |
 Wafers up to 1x3"The industry's single-wafer research MBE standard with more than 200 installations worldwide across all MBE applications. This proven system offers excellent material quality, uptime, and flexibility while maintaining cost efficiency.
GEN II MBE System
* World's proven, premier single-wafer system
* Modular design provides facility and application flexibility
* Excellent material quality and high uptime
* Ideal for producing high-quality, high-purity optoelectronic materials
* Holds numerous GaAs and AlGaAs performance records
More Information, please contact us
|
|
|
|
|
|
Process Tools 
