Sản phẩm và dịch vụ >> Lithography equipments
ACS300 Gen3 Coater & Developer
The modular system of ACS300 Gen3 is specifically designed for demanding high-volume production environments....
MaskTrack Pro Series
MaskTrack Pro solves next-generation lithography roadmap requirements for photomask cleaning, bake and...
ELP300 Gen2 Excimer Laser Stepper
SUSS MicroTec’s ELP300 platform for wafer sizes between 200 and 300 mm employs the latest excimer laser...
DSC300 Gen2 Projection Scanner
The projection scanner DSC300 Gen 2, suitable for wafer sizes up to 300mm, utilizes latest technologies...
XBS200 Wafer Bonder
The universal XBS200 platform allows for aligned wafer bonding of wafer sizes up to 200 mm. Its versatility...
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MA300 Gen2 Mask Aligner
SUSS MicroTec's MA300 Gen2 is a highly automated mask aligner platform for 300mm and 200mm wafers. It...
MA/BA Gen4 Pro Series Mask & Bond Aligner
The MA/BA Gen4 Pro mask and bond aligner is the all-rounder of all SUSS MicroTec's semi-automated mask...
ACS300 Gen2 Coater & Developer
The ACS300 Gen2 is a modular cluster system designed to meet manufacturers' needs for clean, reliable,...
ASx Series
The ASx series is SUSS MicroTec’s fully-automated photomask processing platform for 250 nm to 65 nm...
DSC500 Projection Scanner
The DSC500 semi-automatic projection lithography platform by SUSS MicroTec supports substrate sizes of...
XBC300 Gen2 Debonder & Cleaner
The XBC300 Gen2 debonder and cleaner platform is designed for processing wafers of 200 and 300 mm in...
MA/BA Gen4 Series Mask and Bond Aligner
The MA/BA Gen4 series represents the latest generation of SUSS MicroTec’s semi-automated mask and bond...
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